采用微波电子回旋共振磁过滤弧设备制备钛氧薄膜。
Ti-O film was prepared by microwave-electron convolute resonance (MW-ECR) magnetron filter arc deposition process.
微波电子回旋共振等离子体是淀积薄膜、微细加工和材料表面改性的一种重要手段。
The microwave electron cyclotron resonance (ECR) plasma is one of the most important means for depositing thin films and microfabrications as well as surface modifications of materials.
在微波电子回旋共振低温等离子体条件下，用二乙二醇二甲醚为试剂对镍钛合金进行表面改性。
A coating on NiTi alloys surfaces was prepared under diethylene glycol dimethyl ether (diglyme) microwave cold-plasma in electron cyclotron resonance conditions.
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