介绍了基于微机电一体化系统（MEMS）的微槽冷却系统的研究成果。
The research on microchannel cooling system based on MEMS was introduced in this paper.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
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