生物医学仪 器采用先进的微电子技术、微电子微机械系统技术（MicroElectromechanical System，MEMS）和信息技术，从而使其体积迅速减小，同时性能大幅提升。
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介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。
Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
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