...微机械技术 [gap=772]Key Words: Microelectromechanical systems, Micro sensors, Micro actuators, Micromachining technology ...
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微夹钳技术是微机械技术的重要内容之一。
Microgripper technique was one of important parts in micromachine techniques.
利用压电薄膜和表面微机械技术可实现新型的氧化锌簿膜器件。
A new type of zine oxide (ZnO) thin film devices can be realized utilizing piezoelectric and surface micromachine technology.
由电池驱动以微机械技术制造的气体传感器的功耗是十分关键的实际问题。
The power consumption of battery-driven micro-machined gas sensors is more critical.
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