电容式微机械陀螺仪是目前微机械传感器研究的重点。
The parameters of capacitive micromachined gyroscope structure were confirmed by theory research and emulation analysis.
详细论述了一种基于微机械传感器与AT 89 C2 0 51单片机的智能振动传感器。
A smart vibration sensor based on AT89C2051 microcomputer and the micro-accelerometer is described.
讨论利用微机械加工技术制作传感器的可能性、必然性。
This paper examines the possibility and necessity of using micromachining technology for sensor manufacturing.
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