设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。
A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.
实验表明，采用该集成化结构设计的硅微声传感器，具有高的Q值、高的信噪比及很强的抗干扰能力。
The detail of the production is described. The experiment results show that the micromachine sound sensor with the integral structure is one with high Q-factor, hi…
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