提出一种带有杠杆机构的电容检测微型加速度计。
The paper puts forward a new type of micro-accelerometer with lever mechanisms which uses capacitance detection.
文中介绍了扭摆式硅微型加速度计的机械结构、工作原理。
The pendulous Si micromechanical accelerator's mechanical structure and the principle of operation are presented.
微型加速度计作为一种新型惯性传感器，它在体积、重量、成本、功耗、可靠性和寿命方面都具有传统加速度计无可比拟的优势。
As a new style of the inertial sensor, the micro accelerometer has many advantages over the traditional accelerometer in its bulk, weight, cost, power consumption, reliability and length of life.
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