介绍了一种新型的基于平面等倾干涉原理的高精度平面度测量系统。
This paper introduce a new type of high precision measurement system based on plane isoclinic interference theory (PUT).
介绍了一种采用斜光学三角形测量结构和基于虚拟精密测量基准的太阳帆板平面度无接触测量系统及误差补偿方法。
A solar panel substrate planeness non contact system, which employ declinate optical triangulation method, and bases on virtual precise benchmark, is presented.
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