本发明涉及具有双装载选项的带电粒子光学系统。
The invention relates to a charged-particle optical system with dual loading options.
证明ad方法对带电粒子光学系统的像差分析是极其有效的。
It is concluded that AD method is a rather effective tool for the aberration analysis of charged particle optical systems.
该带电粒子光学系统具有装载器（106），该装载器具有可移入和移出空间的一部分（108）。
The microscope has a loader (106) with a part (108) that is moveable into and out of the space.
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