提出了一种可同时测量位移和角度的变面积式差动电容传感器的设计方案。
An area-alterable differential capacitive sensor is discussed, which can measure both displacement and angle.
详细介绍了高精度差动电容位移传感器，并研究了仪器的抗干扰措施。
The high accuracy differential capacity displacement sensor is introduced in detail. Meanwhile the antijamming measure is studied.
研究了微电容式压力传感器的差动电容结构设计和微谐振式压力传感器的微谐振子结构设计，利用ANSYS软件对微差动电容的结构进行了优化设计。
A micro differential capacitance and a micro harmonic oscillator are studied and designed. The structure of the micro differential capacitance is optimized by use of the ANSYS software.
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