提高作为纳米科技的“眼”和“手”的扫描探针显微镜(SPM)的测量和定位精度，是纳米仪器界始终追求的目标。

It is an objective for nanometer instrument researcher to improve the measurement precision of scanning probe microscope (SPM), the eye and hand of nanometer science and technology.

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光杠杆法是原子力显微镜(afm)悬臂定位的主要方法。

Optical lever method is a main technique to detect the cantilever's position in atomic force microscope (AFM).

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该方法利用精密线纹尺和读数显微镜对数控机床的定位精度和重复定位精度进行检验。

In this method, the positioning accuracy and repeated positioning accuracy are tested using the precision linear scale and the reading microscope.

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