多晶硅锭的制备工艺主要包括定向凝固法及浇铸法。
The production process for making poly silicon mainly includes directional solidification and casting methods.
多晶硅锭的生长工艺过程都要通过加热室的调整来实现。
Technique process of growth of the polycrystalline silicon is based on the adjustment of the heating chamber.
一种定向凝固生长多晶硅锭工艺,本发明属于半导体材料硅晶体的制备。
The invention discloses a technology for the directional solidification growth of polycrystalline silicon ingot, belonging to the preparation of semiconductor material silicon crystal.
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