本文提出了一种新的方法，多普勒外差法测量表面面形，并首次提出和制作了同步相位计。
This paper describes a new method, Doppler heterodyne measurement method of surface profile, using a simultaneous phase comparator.
结合激光外差干涉法和透射式椭偏测量原理，研究了一种快速、高精度测量纳米厚度薄膜光学参数的方法。
Based on the optical heterodyne interferometer and transmission ellipsometry, a new fast measurement technique of nanometer film was presented computational.
文本用纵向塞曼双频稳频激光器作光源，提出了一种光学超外差法小平面角的精密测量方法。
This paper discussed an opto-heterodyne technique for small-plane-angle measurement with a frequency-stabilized longitudinal Zeeman laser as the light source.
应用推荐