使用薄膜沉积法和离子束刻蚀法制作16阶菲涅耳透镜，应用于折衍混合CCD相机。
The 16-step Fresnel lens had been fabricated by thin film deposition and ion beam etching and it has been used in refractive-diffractive CCD camera.
在薄膜沉积和离子束刻蚀技术中，通常要给绝缘基片加上一个射频或脉冲电极，以便在绝缘基片上形成一个自偏压来控制轰击到绝缘基片表面的离子能量。
Self-bias voltage of the dielectric substrate surface and voltage of the driven electrode were experimentally studied to improve the energy control of impinging ion in plasma processes.
根据目前的实验研究报道，这种周期结构金属薄膜通常利用聚焦离子束刻蚀工艺来获得，器件的光学响应在可见光波段和近红外波段。
In most of the experiments reported to date, the perforated metal films were fabricated by the focused-ion-beam method, and their transmission enhancement was in the visible and near-infrared regions.
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