该刀片具 有作为结晶各向异性蚀刻的高次面的刃口,该刃口相对于上述研磨面 以锐利的角度倾斜。
This blade has an edge as the higher order face of the crystal anisotropic etching and the edge inclines at a sharp angle to the polished face as described above.
本发明涉及多层膜的蚀刻方法,特别是各向异性磁电阻效应(amr)传感器制造中所使用的多层膜的蚀刻方法。
The present invention relates to combined dry and wet etching process for multilayer film, especially in anisotropic magnetic resistance effect (AMR) sensor manufacture.
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