Tilt mirrors; Piezoelectric actuators; Adaptive optical systems; Error correction.
倾斜镜; 压电驱动器; 自适应光学系统; 误差校正。
参考来源 - 两维高速压电倾斜反射镜·2,447,543篇论文数据，部分数据来源于NoteExpress
运用压电陶瓷传感器与压电驱动器结合的方法。
That was used piezoelectric ceramics which was in combine with piezoelectric ceramics driver.
分析了叉指形电极压电驱动器的结构特点和电场结构。
Firstly, the structure and electric field of interdigitated electrode piezoelectric ceramic actuator were studied.
压电泵作为一种新型压电驱动器，有着广阔的发展前景。
Piezoelectric pump, a new type of piezoelectric actuator, has many potential applications in the future due to its characteristics.
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