就光栅角度传感器的误差来源以及消除误差的措施进行分析和研究。
This paper gives the research and the analysis about the error source and the erasing method of error on the grating angle sensor.
根据衍射光栅的计量特点，建立了正交衍射光栅测量误差模型，推导了光栅安装误差与测量误差之间的关系。
According to metrological characteristics of diffraction grating, the measurement error models are built up and the equations between installation and measurement errors of grating are deduced.
由于光栅干涉测量系统以光栅栅距作为测量基准，相对于传统干涉仪，光栅尺系统受环境因素造成的测量误差影响较小。
Because the measurement standard of grating system is grating pitch, compared to usual interferometer, diffractive grating, system reduces environment influence on measurement accuracy.
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