光栅角位移测量系统 Grating angular displacement measuring system
光栅线位移测量系统 Grating linear displacement measuring system
光栅线位移测量链 grating linear displacement measuring chain
光栅式线位移测量装置 grating type linear measuring system
提出一种具有绝对零位标识的光栅位移测量系统的误差补偿方法。
A method for compensating the measuring error of the grating displacement measurement system with absolute zero mark is presented.
本文主要就大量程纳米级光栅位移测量系统的关键技术进行研究。
In this dissertation, the technologies are studied which correlate to grating displacement measurement system with long-range displacement and nanometer resolution.
从MOS图像传感器构成的粗线纹光栅位移测量系统的原理出发，对光栅测量系统的精度和跟踪速度这两个最重要的问题进行了理论分析。
Based on the principle of coarse grating displacement measurement system made of MOS sensor, the relationships between track velocities and accuracy of the system are analyzed theoretically.
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