optical projection reading device 光学投影读数装置 optical projection system 光学投影系统; 投影系统 optical projector 投影系统; 光学投影机; 光学投影仪 ..
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电传光学投影系统 [光] teletype optical projection system
施密特光学投影系统 Schmidt projection optics
缩图光学投影系统 pantograph optical projection system
设在光学投影系统 helmet-mounted optical projection system
数字式光学投影系统 digital optical projection system
投影光学系统 projection optical system ; Projection lens system
光学缩图投影系统 pantograph optical projection system
本文从投影光刻机的图形传递要求出发，导出投影光刻机各主要光学系统的具体要求，并讨论这些参数确定的局限性。
The specific parameters of main optical system are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.
方法设计的焦度计主要由照明系统、准直系统、投影光学系统组成。
Methods The designed lensometer primarily consists of light system, collimating system and projective system.
与传统的光学测量方法不同，测量系统采用两个CCD相机记录投影光栅，减小了测量误差，提高了测量精度。
Differing from the traditional optical measuring method, the measuring system USES two CCD cameras to record projection grating, thus reduces errors and improves measuring accuracy.
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