激光直写机是制作衍射光学元件的关键设备，离焦检测技术是其中的重要单元技术之一。

Laser direct writing system is the key equipment for fabrication of optical diffractive elements, and the defocus detection technique is the important sub-tech in it.

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同时轮廓仪也可直接用于中低精度非球面光学元件的最终检测。

Meanwhile it is suitable for final testing of optical element with reasonable accuracy.

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结果表明，文中提出的波前重建算法和采用的光路系统可用于实际光学元件面形的准确检测，系统的重复性也得到了研究。

The results show that both the wavefront reconstruction algorithm and the optical system are able to exactly test the optics surface. And the repeatability of the setup is analyzed.

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