该实验装置包括低温真空腔体、真空抽气系统、ZYGO干涉仪和防震平台以及监控测温系统。
The cryogenic optical experiment equipment was comprised of cryogenic vacuum chamber, vacuum set, ZYGO interferometer, proof vibration sub-system and controlled measuring temperature 'sub-system.
介绍进行残气质谱分析的目的，方法和采用的差分抽气质谱分析系统； 给出装置调试过程中常温和低温状态下残气谱图；
The aim and the method of mass spectrum analysis for residual gas and the differential pumping system, meanwhile, are introduced.
本发明的低温吸附组合抽气装置，不需要液氮储存筒，具有结构简单、紧凑、小 巧的特点。
Storage cylinder for liquid nitrogen is not needed in the invention and its structure is simple and compact so on.
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