现在已经采用了低温吸附技术和吸气离子泵的近代电子抽气设备。
Recent electronic means of pumping using low temperature sorption techniques and getter-ion pumps have been introduced.
本发明的低温吸附组合抽气装置，不需要液氮储存筒，具有结构简单、紧凑、小 巧的特点。
Storage cylinder for liquid nitrogen is not needed in the invention and its structure is simple and compact so on.
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