该文应用傅里叶光学原理对扩展光源照明下光栅的成象特性作了分析，并由此设计出一种新型的光栅成象型位移传感器。
Basedg on Fourier optical principle, the imaging property of grating illuminated by expansion source is analysed in this paper. Hence an innovative grating imaging displacement sensor is designed.
本文介绍了一种新型的基于改进傅科聚焦探测法且自带衍射光栅计量系统的非接触式位移传感器。
This paper presents a new non-contact displacement sensor with diffraction grating metrology system based on an improved Foucault focus detection method.
研制了一种新型的密封式超长精密钢带光栅线位移传感器。
A new linear displacement sensor with sealed ultra-long precision steel belt grating is studied.
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