... 伺服控制扫描干涉仪:servocontrolled scanning interferometer 伺服控制镜:servo-control mirror 伺服调谐:servo-tuning ...
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针对扫描镜精密伺服系统,本文采用按照电流环、速度环和位置环等三个回路进行控制系统设计的开闭环复合控制方案。
The scanning mirror precise servo system is designed by the scheme of compound control of open and closed loops with current, velocity and position loops in this paper.
本文给出一种非线性控制器,并将它应用于扫描镜精密伺服系统的校正。
A kind of nonlinear controller nPI is presented and used to correct scanning mirror precise servo system in this paper.
介绍了一种扫描镜伺服系统的结构组成及其工作原理,分析了系统中的耦合特性,设计了伺服控制器。
The structure formation and the operating principle of the servo system for a scanning mirror are introduced in the paper. The coupling property is analyzed and the controller is designed.
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