动态随机存储器栅极侧壁硅化钨残留造成的短路成为制约提高产品良率及可靠性的瓶颈。
Dynamic random access memory (DRAM) suffers from the bridge issue due to the WSix residue on gate sidewall, which is the bottleneck to enhancing the product's yield and reliability.
本项目的目的是对原有的洁净温湿度控制系统上进行改善，以求提高温湿度控制的精度，缩小其波动范围，间接提高产品的良率。
This project is aim to improve the temperature and humidity control of clean room, to enhance the control accuracy and reduce fluctuation, to raise the product yield indirectly.
本发明的背光模组框架的制备方法具有提高制备背光模组框架的生产效率和产品良率的优点。
The preparation method of the backlight module frame has the advantage of improving the production efficiency and the yield of the backlight module frame.
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