... 微型机系统: Microcomputer-based system 了微型机电系统: Micro Electro Mechanical Systems 微型机电系统: MEMS ...
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了微型机电系统
A micro-electromechanical system
以上为机器翻译结果，长、整句建议使用 人工翻译 。
本文阐述了微型机电系统(MEMS)领域中微泵的几种常见的致动方式及其特点。
Several common micro mechanical driving modes as well as their characteristic of micro-pump in MEMS field are described in this paper.
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