相对于传统PID主从同步控制方法,同步偏差的移动平均差减小18.2%,移动标准差减小61.5%,可以保证光刻机的曝光效果。
Compared with the conventional PID masterslave control method, the move mean difference is reduced by 18.2% and the move standard deviation is reduced by 61.5%, and the exposure effect can be ensured.
一些线程用于处理主从服务器的同步,以便执行复制。
There are threads for handling synchronization of master and slave servers for replication.
建立了主从式同步卷绕控制系统的数学模型,并详细介绍了控制系统硬件和控制方法的具体设计。
The mathematical model of master-slave synchronous winding control system is established here, and the design methods of the system hardware and control method are introduced in detail.
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