利用激光多普勒效应实现固体面内位移测量时,由于散射光的多普勒信号十分微弱,有时还出现淹没或不连续,影响位移测量精度。
In the displacement measurement system of scattering surface laser Doppler effect, the measuring accuracy is affected by the weakly Doppler signal that may be lost or discontinuous.
所提方法扩大了可测深度范围,可用于测量面形较陡的连续表面或不连续深结构表面。
Advantage of the approach is that the depth measurement range is expanded very much, it can be used to measure the profile of the deep or discontinuous surface.
提出了处理不连续点的办法,给出了两个计算实例,计算结果与实验测量结果十分一致。
An approach to remove the singularity is presented. At last, two numerical computation examples are illustrated to show good agreement between computed end treasured results.
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