实验结果表明，传统的四象限探测仪测角算法具有较大的误差。

It has been proved by experiment that the traditional Angle measurement algorithm of the detector with four quadrants is of big measurement error.

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文中对测量误差进行了简要的论述，分析了四象限光电池引入的系统误差和修正方法。

The system error introduced by the four-quadrant photocell and the error correction method are analyzed emphatically.

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该系统采用两个四象限探测器构成对准检测装置，实现对掩模版对准误差的实时检测。

The measure device consists of two quadrant detectors, which measure alignment errors in real-time.

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