经分析选取了激发光强、覆盖率和物镜的数值孔径作为实验研究对象。
After analyzed, the exciting laser intensity, the coverage rate and the numerical aperture of objectives are selected for experimental research.
模拟结果表明，这种新型滤波器不仅可以提高高数值孔径物镜的纵向分辨率，同时基本上不影响横向分辨率。
Numerical results show that this new kind of pupil filters can realize not only axial superresolution, but also not influence transverse resolution.
在高数值孔径、低工艺因子的光刻技术中，投影物镜彗差对光刻质量的影响变得越来越突出，因而需要一种快速、高精度的彗差原位测量技术。
In high numerical aperture and low technic factor lithography process, degradation of the image quality because of the coma aberration in the projection lens has become a serious problem.
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