介绍了压电陶瓷超声微马达的结构与特性。

The characteristics of piezoelectric ultrasonic micro motor were introduced briefly.

youdao

目前虽已有电磁、静电、压电、超声等多种驱动形式的微马达问世，但不免有其各自的缺点。

Though there are several kinds of micro motors such as electromagnetic, electrostatic, piezoelectric and ultrasound micro motors currently, they all have their own limits.

youdao

为了实现微马达在精密MEMS系统中的应用，采用了一种简单、实用的方式来实现微马达的步距细分。

In order to apply it in MEMS system, a simple but effective method is used to realize the subdivision of a step Angle.

youdao