在半导体激光正弦相位调制干涉仪中,光源输出光强的变化是测量误差的主要来源。
In sinusoidal phase modulating laser diode interferometer, the main error source is the variation in output light intensity of light source.
实际干涉计量中各种干扰因素的存在,使得包裹相位图中可能存在噪声、低调制点或散斑等误差点。
Many factors, such as noise, speckles and low modulation in wrapped phase make the unwrapping procedure complicated and path-dependent.
在研究相位偏移干涉测量技术基础上,重点研究了五幅算法计算精度及移相误差对计算结果的影响;
The deviation introduced by reference phase shifting errors on four-steps and five-steps algorithm are analyzed.
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