This paper summarizes the research developments on the energy uniformity of the excimer laser.
本文概述了国内外准分子激光在光束能量均匀化方面的研究进展。
Lens array consists of many array units, which can improve energy distribution uniformity around the focus of main lens.
列阵透镜由多个列阵元拼接而成，用以改善主透镜焦点附近能量分布的均匀性。
The methods and results for the 5 main parameters of energy, beam current, dose uniformity, beam scanning width, and beam profile were given.
给出了能量、流强、扫描均匀性、扫描长度以及束斑形状等5个重要参数的测量方法及结果。
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