The films were studied by ellipsometer,XRD and SEM.
并用椭偏仪、X射线衍射(XRD)和扫描电子显微镜(SEM)对薄膜样品进行了研究。
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Fundamentals of ellipsometry and automatic ellipsometers are introduced briefly, and a sample machine of new type automatic null ellipsometer has been designed and constructed.
简要介绍了椭圆偏振测量术的基本原理及自动椭偏仪,并设计制作了一台新型自动消光椭偏仪的原理样机。
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