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The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator.
上述检测电路检测上述静电型致动器的上述绝缘膜中所积蓄的上述电荷量。
A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit.
半导体集成电路具有静电型致动器、检测电路、存储电路及偏置电路。
The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.
上述偏置电路根据上述存储电路存储的上述检测结果，使用于驱动上述静电型致动器的驱动电压变化。
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