electron cyclotron resonance ecr 电子回旋共振
ecr electron cyclotron resonance 电子回旋共振
electron cyclotron resonance ecr plasma 电子回旋共振等离子体
The microwave electron cyclotron resonance (ECR) plasma is one of the most important means for depositing thin films and microfabrications as well as surface modifications of materials.
微波电子回旋共振等离子体是淀积薄膜、微细加工和材料表面改性的一种重要手段。
The numerical method for resolving the wave propagation and absorption of the electron cyclotron resonance(ECR) is proposed.
介绍了电子回旋共振（ECR）波的传播与吸收的数值求解方法。
The distribution of radicals in CHF3/C6H6 electron cyclotron resonance (ECR) plasma was investigated by an actinometric optical emission spectroscopy (AOES).
使用光强标定的发射光谱（AOES）测量了CHF3/C6H6混合气体的微波电子回旋共振（ECR）放电等离子体中基团的分布状态。
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