Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.
微机械技术是研究,生产微机械器件和微电子机械系统的关键技术,熟练掌握并不容易。
The paper expatiated the principle of giant magnetostrictive motor from structure and properties, and the application status in micro electro mechanical systems (MEMS).
从结构和性能上阐述了超磁致伸缩微型马达的原理及其在微机电系统中的应用状况。
Similarly, cosmic and solar flare radiations degrade electro-mechanical systems.
同样地,宇宙射线和太阳耀斑的辐射也会损害机电系统的功效。
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