wafer dose uniformity 晶圆离子注入均质性 ; 晶圆变形
batch-to-batch dose uniformity 批次间之注入均质性
tablet dose uniformity 片的均匀性
wafer-to -wafer dose uniformity 晶圆间离子值入之均质性 ; 晶圆扭转
dose uniformity ratio 剂量均匀度
implant dose uniformity 注入均匀性
Implantation dose uniformity 注入剂量均匀性
uniformity mass single-dose preparations 单剂量均匀度
implantation dose non-uniformity 注入剂量不均匀性
The methods and results for the 5 main parameters of energy, beam current, dose uniformity, beam scanning width, and beam profile were given.
给出了能量、流强、扫描均匀性、扫描长度以及束斑形状等5个重要参数的测量方法及结果。
The quantity and the speed of creating image of the industrial CT closely relate to the accelerator's focus, the highest X-ray energy, X rays dose and dose uniformity.
加速器电子束的焦点、X射线的最高能量、X射线剂量及均匀性与工业CT成像的质量和速度密切相关；
Results Taget dose uniformity:The dose uniformity in target for two IMRT techniques, 3D CRT and Field in Field technique were improved in trend compared with conventional technique.
结果五种技术靶区剂量均匀度的优劣：3D和调强技术比常规技术有改善趋势。
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