The method to increase the doping content by using multilayer impurity film was pointed out by analyzing the effect of monolayer impurity film to the doping content.
通过分析单层杂质膜对掺杂量的局限性,提出了利用多层杂质膜的手段来提高掺杂量。
参考来源 - 空气氧化法制备VO·2,447,543篇论文数据,部分数据来源于NoteExpress
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