...侧壁表面压阻；位移检测；参数优化 [gap=1016]Keywords: MEMS; DRIE; sidewall surface piezoresistor; displacement detection; parameters optimization ...
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Displacement detection type 位移测量型
micro-displacement detection 微位移检测
rotor displacement detection 转子位移检测
micro displacement detection 微位移检测
angle displacement detection 角位移检测
lathe displacement detection 机床位移检测
raster displacement detection 光栅位移检测
Watergate Displacement Detection 闸门位移量检测
This paper mainly introduced raster displacement detection system based on FPGA.
本论文主要研究基于FPGA的光栅位移检测系统。
参考来源 - 基于FPGA的光栅位移检测技术研究·2,447,543篇论文数据，部分数据来源于NoteExpress
This paper mainly introduced raster displacement detection system based on FPGA.
本论文主要研究基于FPGA的光栅位移检测系统。
Sub-micron accuracy of displacement detection is obtained by adopting edge fitting technology and path matching technology.
该方法采用边界拟合和“路径匹配”技术，使位移量的检测精度达到了亚微米级。
The principle, requirement and techniques satisfying with this requirement of displacement detection circuits are described.
阐述了位移检测电路的原理和要求，以及满足这些要求所采用的技术措施。
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