The etching pattern of dislocation loop consisted of several dislocation lines. While with increasing annealing time it changed into semicircular.
位错环的腐蚀形貌由多条位错线组成,随着退火时间的延长,其形貌变为由一条位错线组成的半环形。
参考来源 - 快中子辐照直拉硅中氧沉淀及诱生缺陷研究·2,447,543篇论文数据,部分数据来源于NoteExpress
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