In the displacement measurement system of scattering surface laser Doppler effect, the measuring accuracy is affected by the weakly Doppler signal that may be lost or discontinuous.
利用激光多普勒效应实现固体面内位移测量时,由于散射光的多普勒信号十分微弱,有时还出现淹没或不连续,影响位移测量精度。
It is a simple principle and higher measurement precision without complicated phase unwrapping and calibration procession, and can be used to measure the discontinuous and spatial isolation shape.
且原理简单,测量精度高,不需要复杂的相位展开和校准过程,特别适用于测量突变面形和空间离散面形。
The surfaces of diffraction optical element (DOE) are often deep and discontinuous, which lead to some difficulties for measurement of the 3-d surface topography of DOE.
衍射光学元件(DOE)表面形貌的测量需要解决因表面结构深度较大和表面不连续给测量带来的困难。
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