The experiments , comparison and analysis for the three thickness measurement methods :two-beam diffraction method , contamination spot method and contamination line method were carried out.
前言： 对用电子显微镜测量薄膜厚度的三种方法：双束衍射法、污斑法、污线法进行了实验及比较分析。
The displacement vector for surface relief was determined to be near the invariant line direction using electron back scattering diffraction method.
本工作应用背散射电子衍射技术测得产生浮突的位移在不变线方向附近。
The straight-edge diffraction of this parallel beam superposing on the light spot constitutes the so-called M-line.
这束平行光的直边衍射花纹与光斑本底叠加的结果在观察屏上形成为通常所称的M线。
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