In view oi the problems existing in the silicon micro pressure sensors, this paper proposes the chemical etching techniques and the selective etching processes to control diaphragm thickness.
并针对硅微压传感元件研制中存在的问题，提出采用化学腐蚀技术，选择性腐蚀工艺控制膜厚。
Design parameter analysis for the joints is carried out through finite element method so as to find out the influence of diaphragm thickness, extend length, axial compression ratio on joint behavior.
进行了节点参数分析，通过有限元数值计算，掌握了隔板厚度、挑出长度及轴压比对节点性能的影响规律。
The major parameters including the curvature radius, the ratio of height to span, the ratio of height to width, the thickness of web, the stiffener density and the diaphragm density are studied.
主要研究了曲率半径、宽跨比、高宽比、腹板厚度、加劲肋数量、横隔板间距等结构参数对曲线钢箱梁承载力和变形特性的影响。
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