The different phase composition of the films has been obtained by changing oxygen partial pressure, sputtering powers, deposition times and materials of substrate.

通过改变氧分压强、溅射功率、沉积时间和衬底材料来获得不同相组成的氧化钒薄膜。

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The influence of deposition potential and Na-citrate concentration on composition and morphology of electrodeposited films was studied in detail.

深入探讨了沉积电位和柠檬酸钠浓度对预制层的形貌和成分的影响规律。

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The influence of various experimental parameters on deposition rate film composition and hardness has been studied, Bias is considered as the most effective Darameter.

研究了各种实验参数对沉积速率、薄膜组成及膜层硬度的影响，认为偏压是最具影响的参数。

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