Methods in modeling and numerical simulation for the high density plasma processing are introduced, namely, continuous and kinetic methods.
介绍了与高密度等离子体工艺相关的模型和数值模拟方法，即连续流和动力学方法。
It is suggested that the instability is excited in the low density plasma when the electron beam drift velocities exceed the ion acoustic speed.
不稳定性产生的可能机制是由于电子束穿过低密度本底等离子体的漂移速度超过离子声速而激发起来的。
The use of pulsed high energy density plasma is a new low temperature plasma technology for material surface treatment and thin film deposition.
脉冲高能量密度等离子体是一项全新的等离子体材料表面处理和薄膜制备技术。
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