A new pinhole-focusing scheme using referenced defocus signal is applied to an automatic subsystem for laser direct writing.
一种新的采用基准离焦信号的针孔调焦方案，用于激光直写的自动对焦子系统。
Intensity of Gaussian distribution impacts significantly the sensing signal of the defocus phase, in which the error percentage achieves 25%, but for other phase profile, the effect is ignorable.
光强高斯分布对散焦相差的曲率信号影响较大，信号百分比误差达到25%，对其他相差的曲率信号影响很小；
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