Some technical problems concerned with computer control system, stage driving system, beam deflection system are here discussed to point out their development trends.
本文讨论了与计算机控制系统、工作台驱动系统以及电子束偏转系统有关的一些技术问题并提出了这些技术的发展趋势。
These formulae can be used as an analytic solution for quickly estimating the geometric aberrations of a known deflection system and checking the related computer program.
这些公式不但可用来快速估算偏转象差，还可用来作为校验数字计算程序的理论模型。
In this paper, computer aided design of the multi-magnetic-pole deflection system, including three stages with 20 pole pieces, was developed. Our results showed that the deflection...
对三段式的二十极多磁极偏转系统的计算机辅助设计方法进行了介绍，得到会聚良好、具有较高偏转灵敏度的多磁极偏转系统。
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