Making method of high deep-width rate, batch production of planar windings with LIGA process and silicon deep etching process is researched in the thesis.
较深入地研究了以LIGA工艺、硅深刻蚀工艺为主的平面绕阻的高深宽比、批量化制作方法。
参考来源 - 基于微机械工艺的电磁型平面微电机的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
The device USES a deep etching with a shallow etching to shield the "static mirror" effect.
该器件采用一次深刻蚀与一次浅刻蚀，从而屏蔽掉“静态镜面”的影响。
The eutectic growth of cast iron during rapid solidification has been studied with laser remelting and deep etching.
采用激光快速熔凝和深腐蚀技术，对快速凝固过程中铸铁的共晶生长进行了研究。
Making method of high deep-width rate, batch production of planar windings with LIGA process and silicon deep etching process is researched .
较深入地研究了以LIGA工艺、硅深刻蚀工艺为主的平面绕阻的高深宽比、批量化制作方法。
应用推荐