·2,447,543篇论文数据，部分数据来源于NoteExpress
High aspect ratio structures have been successfully fabricated by plasma cryo-etching on silicon wafers.
等离子体低温刻蚀是一种针对高深宽比结构的干法刻蚀技术。
youdao
应用推荐
模块上移
模块下移
不移动